共 15 条
- [3] Fabrication of nanoelectromechanical systems in single crystal silicon using silicon on insulator substrates and electron beam lithography [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06): : 2760 - 2763
- [7] Sub-10 nm lithography with self-assembled monolayers [J]. APPLIED PHYSICS LETTERS, 1996, 68 (11) : 1504 - 1506
- [10] Constructing nanomechanical devices powered by biomolecular motors [J]. NANOTECHNOLOGY, 1999, 10 (03) : 225 - 231