Diamond waveguides fabricated by reactive ion etching

被引：95

作者：

Hiscocks, Mark P. ^{[1
]}

Ganesan, Kumaravelu

Gibson, Brant C. ^{[2
]}

Huntington, Shane T.

Ladouceur, Francois ^{[1
]}

Prawer, Steven ^{[2
]}

机构：

[1] UNSW, Sch EE&T, Sydney, NSW 2052, Australia

[2] Univ Melbourne, Sch Phys, Quantum Commun Victoria, Melbourne, Vic 3010, Australia

来源：

OPTICS EXPRESS | 2008年 / 16卷 / 24期

关键词：

Reactive ion etching - Ions - Single crystals - Fabrication - Ion beams - Ridge waveguides;

D O I：

10.1364/OE.16.019512

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate for the first time the feasibility of all-diamond integrated optic devices over large areas using a combination of photolithography, reactive ion etching (RIE) and focused ion beam (FIB) techniques. We confirm the viability of this scalable process by demonstrating guidance in a two-moded ridge waveguide in type 1b single crystal diamond. This opens the door to the fabrication of a diamond-based optical chip integrating functional elements such as X-crossings, Y-junctions, evanescent couplers, Bragg reflectors/couplers and various interferometers. (C) 2008 Optical Society of America

引用

页码：19512 / 19519

页数：8

共 22 条

[1] 'nano-rods' of single crystalline diamond [J].

Ando, Y ;

Nishibayashi, Y ;

Sawabe, A .

[2] Smooth and high-rate reactive ion etching of diamond [J].

Ando, Y ;

Nishibayashi, Y ;

Kobashi, K ;

Hirao, T ;

Oura, K .

[3] Nanocrystalline diamond resonator array for R-F signal processing [J].

Baldwin, Jeffrey W. ;

Zalalutdinov, Maxim K. ;

Feygelson, Tatyana ;

Pate, Bradford B. ;

Butler, James E. ;

Houston, Brian H. .

[4] Fabrication of short-wavelength photonic crystals in wide-band-gap nanocrystalline diamond films [J].

Baldwin, JW ;

Zalalutdinov, M ;

Feygelson, T ;

Butler, JE ;

Houston, BH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (01) :50-54

[5]

Bennett C. H., 1984, P IEEE INT C COMP SY, DOI DOI 10.1016/J.TCS.2014.05.025

[6] Room temperature stable single-photon source [J].

Beveratos, A ;

Kühn, S ;

Brouri, R ;

Gacoin, T ;

Poizat, JP ;

Grangier, P .

EUROPEAN PHYSICAL JOURNAL D, 2002, 18 (02) :191-196

[7]

Breese M.B.H., 1996, Materials Analysis Using a Nuclear Microprobe

[8] Anisotropic dry etching of boron doped single crystal CVD diamond [J].

Enlund, J ;

Isberg, J ;

Karlsson, M ;

Nikolajeff, F ;

Olsson, J ;

Twitchen, DJ .

CARBON, 2005, 43 (09) :1839-1842

[9]

HARLOW GE, 1998, NATURE DIAMONDS

[10] Reactive ion etching of waveguide structures in diamond [J].

Hiscocks, Mark P. ;

Kaalund, Christopher J. ;

Ladouceur, Francois ;

Huntington, Shane T. ;

Gibson, Brant C. ;

Trpkovski, Steven ;

Simpson, David ;

Ampem-Lassen, Eric ;

Prawer, Steven ;

Butlerc, James E. .

← 1 2 3 →