Thermal mapping with liquid crystal method

被引：40

作者：

Csendes, A

Szekely, V

Rencz, M

机构：

[1] Technical University of Budapest, Department of Electron Devices

来源：

MICROELECTRONIC ENGINEERING | 1996年 / 31卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(95)00350-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Good resolution thermal mapping can be achieved by using liquid crystals. The article presents a new, high resolution automated measuring equipment, which executes the measurement and the evaluation process under computer control. The equipment was developed especially for micro-thermography of integrated circuits. The paper presents the practical aspects of the liquid crystal measuring method. Resolution and accuracy features of the method are also discussed.

引用

页码：281 / 290

页数：10

共 10 条

[1] HIGH-RESOLUTION THERMAL MAPPING OF MICROCIRCUITS USING NEMATIC LIQUID-CRYSTALS [J].