Development of liquid-environment frequency modulation atomic force microscope with low noise deflection sensor for cantilevers of various dimensions

被引：155

作者：

Fukuma, T ^{[1
]}

Jarvis, SP ^{[1
]}

机构：

[1] Univ Dublin Trinity Coll, Ctr Res Adapt Nanostruct & Nanodevices, Dublin 2, Ireland

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2006年 / 77卷 / 04期

基金：

爱尔兰科学基金会;

关键词：

D O I：

10.1063/1.2188867

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have developed a liquid-environment frequency modulation atomic force microscope (FM-AFM) with a low noise deflection sensor for a wide range of cantilevers with different dimensions. A simple yet accurate equation describing the theoretical limit of the optical beam deflection method in air and liquid is presented. Based on the equation, we have designed a low noise deflection sensor. Replaceable microscope objective lenses are utilized for providing a high magnification optical view (resolution: < 3 mu m) as well as for focusing a laser beam (laser spot size: similar to 10 mu m). Even for a broad range of cantilevers with lengths from 35 to 125 mu m, the sensor provides deflection noise densities of less than 11 fm/root Hz in air and 16 fm/root Hz in water. In particular, a cantilever with a length of 50 mu m gives the minimum deflection noise density of 5.7 fm/root Hz in air and 7.3 fm/root Hz in water. True atomic resolution of the developed FM-AFM is demonstrated by imaging mica in water. (c) 2006 American Institute of Physics.

引用

页数：8

共 22 条

[11] ATOMIC-RESOLUTION OF THE SILICON (111)-(7X7) SURFACE BY ATOMIC-FORCE MICROSCOPY [J].

GIESSIBL, FJ .

SCIENCE, 1995, 267 (5194) :68-71

[12] A Fabry-Perot interferometer for micrometer-sized cantilevers -: art. no. 074101 [J].

Hoogenboom, BW ;

Frederix, PLTM ;

Yang, JL ;

Martin, S ;

Pellmont, Y ;

Steinacher, M ;

Zäch, S ;

Langenbach, E ;

Heimbeck, HJ .

APPLIED PHYSICS LETTERS, 2005, 86 (07) :1-3

[13] Megahertz silicon atomic force microscopy (AFM) cantilever and high-speed readout in AFM-based recording [J].

Hosaka, S ;

Etoh, K ;

Kikukawa, A ;

Koyanagi, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (01) :94-99

[14] Frequency modulation detection atomic force microscopy in the liquid environment [J].

Jarvis, S. P. ;

Ishida, T. ;

Uchihashi, T. ;

Nakayama, Y. ;

Tokumoto, H. .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 72 (Suppl 1) :S129-S132

[15] Local solvation shell measurement in water using a carbon nanotube probe [J].

Jarvis, SP ;

Uchihashi, T ;

Ishida, T ;

Tokumoto, H ;

Nakayama, Y .

JOURNAL OF PHYSICAL CHEMISTRY B, 2000, 104 (26) :6091-6094

[16] Towards atomic force microscopy up to 100 MHz [J].

Kawakatsu, H ;

Kawai, S ;

Saya, D ;

Nagashio, M ;

Kobayashi, D ;

Toshiyoshi, H ;

Fujita, H .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (06) :2317-2320

[17]

KITAMURA S, 1995, JPN J APPL PHYS PT 2, V34, pL1086

[18] ATOMIC FORCE MICROSCOPE FORCE MAPPING AND PROFILING ON A SUB 100-A SCALE [J].

MARTIN, Y ;

WILLIAMS, CC ;

WICKRAMASINGHE, HK .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (10) :4723-4729

[19]

Morita S., 2002, Noncontact Atomic Force Microscopy

[20] Rapid imaging of calcite crystal growth using atomic force microscopy with small cantilevers [J].

Paloczi, GT ;

Smith, BL ;

Hansma, PK ;

Walters, DA ;

Wendman, MA .

APPLIED PHYSICS LETTERS, 1998, 73 (12) :1658-1660

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