Performance of SrBi2Ta2O9 for low-voltage, non-volatile memory applications

被引:10
作者
Jones, RE
Zurcher, P
Chu, P
Taylor, DJ
Zafar, S
Jiang, B
Gillespie, SJ
机构
[1] Mat. Res. and Strategic Technologies, Motorola 3501 Ed Bluestein Blvd., MD-K10, Austin
关键词
D O I
10.1080/10584589708015711
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The performance of SrBi2Ta2O9 for ferroelectric non-volatile memory applications is investigated. The temperature dependence of the hysteresis loops, small signal capacitance-voltage measurements, and fatigue resistance are reported. Increasing temperature accelerates fatigue, but excellent fatigue resistance to greater than 10(12) cycles is found for temperatures of 125 degrees C and below. The difference between current-time curves for switched and unswitched capacitors using high-speed pulse measurements indicated the availability of 5.7 mu C/cm(2) for 3 V memory operation.
引用
收藏
页码:199 / 210
页数:12
相关论文
共 17 条
[1]   PREPARATION AND FERROELECTRIC PROPERTIES OF SRBI2TA2O9 THIN-FILMS [J].
AMANUMA, K ;
HASE, T ;
MIYASAKA, Y .
APPLIED PHYSICS LETTERS, 1995, 66 (02) :221-223
[2]  
AURIVILLIUS B, 1950, ARK KEMI, V1, P499
[3]  
Aurivillius B., 1950, Arkiv Kemi, V2, P519
[4]  
Aurivillus B, 1949, ARK KEMI, V1, P463
[5]  
CHU PY, IN PRESS J MAT RES C
[6]   FERROELECTRICS FOR NONVOLATILE MEMORIES [J].
CUPPENS, R ;
LARSEN, PK ;
SPIERINGS, GACM .
MICROELECTRONIC ENGINEERING, 1992, 19 (1-4) :245-252
[7]  
DEARAUJO CAP, 1993, Patent No. 12542
[8]   PROCESSING AND PERFORMANCE OF INTEGRATED FERROELECTRIC AND CMOS TEST STRUCTURES FOR MEMORY APPLICATIONS [J].
DORMANS, GJM ;
LARSEN, PK ;
SPIERINGS, GACM ;
DIKKEN, J ;
ULENAERS, MJE ;
CUPPENS, R ;
TAYLOR, DJ ;
VERHAAR, RDJ .
INTEGRATED FERROELECTRICS, 1995, 6 (1-4) :93-109
[9]  
JAFFE B, 1971, PIEZOELECTRIC CERAMI, P224
[10]   MATERIALS INTERACTIONS IN THE INTEGRATION OF PZT FERROELECTRIC CAPACITORS [J].
JONES, RE ;
MANIAR, PD ;
CAMPBELL, AC ;
MOAZZAMI, R ;
DUPUIE, JL ;
GREGORY, RB ;
KOTTKE, ML ;
BOZACK, ML ;
WILLIAMS, JR ;
FERRERO, JM .
INTEGRATED FERROELECTRICS, 1995, 6 (1-4) :81-92