Sol-gel processing of Pb1-xLaxTi1-x/4O3 thin films

被引:14
作者
Soe, KKK
Maeda, M
Suzuki, I
机构
[1] Dept. of Elec. and Comp. Engineering, Nagoya Institute of Technology, Showa-ku, Nagoya, Aichi 466, Gokiso-cho
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 1A期
关键词
sol-gel; thin films; dip-coating; lead titanate; lanthanum; perovskite; chelating; seeding;
D O I
10.1143/JJAP.35.205
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of lanthanum-modified lead titanate were fabricated by sol-gel processing. The complex alkoxides were prepared by reacting Pb acetate and La acetate with an equimolar solution of titanium tetraisopropoxide and acetylacetone. Acetylacetone was added to titanium tetraisopropoxide as a chelating agent. Thin films were deposited on Si(100), Pt/Si(100) and Pt/MgO(100) substrates by dip-coating. X-ray diffraction analyses were carried out to investigate the crystalline phase assignment and crystallographic orientation in the thin films. Thin films deposited on Si(100), Pt/Si(100) and Pt/MgO(100) substrates exhibited the perovskite single phase and showed no preferred orientation.
引用
收藏
页码:205 / 209
页数:5
相关论文
共 16 条
  • [1] PREPARATION AND BASIC PROPERTIES OF BATIO3-BAPBO3 MULTILAYER THIN-FILMS BY METAL-ALKOXIDES METHOD
    AZUMA, T
    TAKAHASHI, S
    KUWABARA, M
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B): : 4089 - 4091
  • [2] Budd K. D., 1985, British Ceramic Proceedings, P107
  • [3] PREPARATION OF C-AXIS ORIENTED PBTIO3 THIN-FILMS AND THEIR CRYSTALLOGRAPHIC, DIELECTRIC, AND PYROELECTRIC PROPERTIES
    IIJIMA, K
    TOMITA, Y
    TAKAYAMA, R
    UEDA, I
    [J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (01) : 361 - 367
  • [4] EPITAXIAL-GROWTH AND THE CRYSTALLOGRAPHIC, DIELECTRIC, AND PYROELECTRIC PROPERTIES OF LANTHANUM-MODIFIED LEAD TITANATE THIN-FILMS
    IIJIMA, K
    TAKAYAMA, R
    TOMITA, Y
    UEDA, I
    [J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (08) : 2914 - 2919
  • [5] Jona F., 1962, FERROELECTRIC CRYSTA
  • [6] LANDAU LD, 1942, ACTA PHYSICOCHIM URS, V17, P41
  • [7] Effects of seeding layer on perovskite transformation, microstructure and transmittance of sol-gel-processed lanthanum-modified lead zirconate titanate films
    Lee, Joon Sung
    Kim, Chang Jung
    Yoon, Dae Sung
    Choi, Chaun Gi
    Kim, Jae Myung
    No, Kwangsoo
    [J]. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1994, 33 (1 A): : 260 - 265
  • [8] MARTIN SJ, 1988, ELECTRON LETT, V214, P1486
  • [9] MILE SJ, 1991, J AM CERAM SOC, V74, P1407
  • [10] PBTIO3 THIN-FILM ULTRASONIC MICRO-SENSOR FABRICATED ON SI WAFER
    OHTANI, K
    OKUYAMA, M
    HAMAKAWA, Y
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 : 133 - 135