Nitrogen doping of Te-based II-VI compounds

被引:20
作者
Tatarenko, S
Baron, T
Arnoult, A
Cibert, J
Grun, M
Haury, A
dAubigne, YM
Wasiela, A
Saminadayar, K
机构
[1] UNIV GRENOBLE 1,F-38402 ST MARTIN DHER,FRANCE
[2] CEA GRENOBLE,DRFMC SP2M PSC,F-38054 GRENOBLE 9,FRANCE
关键词
multilayers; molecular beam epitaxy; II-VI semiconductors; doping;
D O I
10.1016/S0022-0248(96)01003-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We report on the doping properties of the II-VI Te-related compounds, ZnTe, CdTe and CdZnTe, CdMgTe and ZnMgTe, using two different nitrogen plasma sources. High doping levels are measured for ZnTe, slightly lower for CdTe (8 x 10(17) cm(-3)). Following the comparative study of nitrogen doping in these materials, we invoke the possible formation of nitride compounds as responsible for the large nitrogen amount incorporated in Mg-containing alloys. The formation of such compounds might be reduced by using appropriate growth conditions and doping levels in the 4 x 10(17) cm(-3) range are obtained in ternary and quaternary alloys containing Mg. Such doping levels allow the growth and the study of high-quality modulation-doped heterostructures.
引用
收藏
页码:682 / 687
页数:6
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