Nanowire arrays defined by nanoimprint lithography

被引：339

作者：

Mårtensson, T ^{[1
]}

Carlberg, P ^{[1
]}

Borgstrom, M ^{[1
]}

Montelius, L ^{[1
]}

Seifert, W ^{[1
]}

Samuelson, L ^{[1
]}

机构：

[1] Lund Univ, Nanometer Consortium, S-22100 Lund, Sweden

来源：

NANO LETTERS | 2004年 / 4卷 / 04期

关键词：

D O I：

10.1021/nl035100s

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We demonstrate the use of nanoimprint lithography to define arrays of vertical InP nanowires. Each nanowire is individually seeded from a catalyzing gold particle and then grown via vapor-liquid-solid growth in a metal-organic vapor phase epitaxy system. The diameter and position of each nanowire can be controlled to create engineered arrays, demonstrated with a hexagonal photonic crystal pattern. This combination of nanoimprint and self-assembly of nanostructures is attractive for photonics and electronics, as well as in life sciences.

引用

页码：699 / 702

页数：4

共 28 条

[1] Nanotechnology: Wired for success
Appell, D
[J]. NATURE, 2002, 419 (6907) : 553 - 555
[2] Improving stamps for 10 nm level wafer scale nanoimprint lithography
Beck, M
Graczyk, M
Maximov, I
Sarwe, EL
Ling, TGI
Keil, M
Montelius, L
[J]. MICROELECTRONIC ENGINEERING, 2002, 61-2 : 441 - 448
[3] Nanowire resonant tunneling diodes
Björk, MT
Ohlsson, BJ
Thelander, C
Persson, AI
Deppert, K
Wallenberg, LR
Samuelson, L
[J]. APPLIED PHYSICS LETTERS, 2002, 81 (23) : 4458 - 4460
[4] One-dimensional steeplechase for electrons realized
Björk, MT
Ohlsson, BJ
Sass, T
Persson, AI
Thelander, C
Magnusson, MH
Deppert, K
Wallenberg, LR
Samuelson, L
[J]. NANO LETTERS, 2002, 2 (02) : 87 - 89
[5] Size- and shape-controlled GaAs nano-whiskers grown by MOVPE:: a growth study
Borgström, M
Deppert, K
Samuelson, L
Seifert, W
[J]. JOURNAL OF CRYSTAL GROWTH, 2004, 260 (1-2) : 18 - 22
[6] Cabodi M, 2002, ELECTROPHORESIS, V23, P3496, DOI 10.1002/1522-2683(200210)23:20<3496::AID-ELPS3496>3.0.CO
[7] 2-9
[8] Lift-off process for nanoimprint lithography
Carlberg, P
Graczyk, M
Sarwe, EL
Maximov, I
Beck, M
Montelius, L
[J]. MICROELECTRONIC ENGINEERING, 2003, 67-8 : 203 - 207
[9] Imprint lithography with 25-nanometer resolution
Chou, SY
Krauss, PR
Renstrom, PJ
[J]. SCIENCE, 1996, 272 (5258) : 85 - 87
[10] Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species
Cui, Y
Wei, QQ
Park, HK
Lieber, CM
[J]. SCIENCE, 2001, 293 (5533) : 1289 - 1292

← 1 2 3 →