Size- and shape-controlled GaAs nano-whiskers grown by MOVPE:: a growth study

被引:98
作者
Borgström, M [1 ]
Deppert, K [1 ]
Samuelson, L [1 ]
Seifert, W [1 ]
机构
[1] Lund Univ, S-22100 Lund, Sweden
关键词
nanostructures; metalorganic vapor phase epitaxy; semiconducting III-V materials;
D O I
10.1016/j.jcrysgro.2003.08.009
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We have investigated the Au-catalyzed GaAs <111 > B whisker growth under low-pressure metal-organic vapour phase epitaxy conditions. By varying the growth temperature we found a maximum in the whisker growth rate at about 450-475degreesC. With increasing temperature the growth rate decreases due to competing growth at the (111) substrate surface and at the {I 101 whisker side facets, which leads to significant tapering of the whiskers. For low temperatures, the growth rate R in the In R = f (1/T)-plot results in an Arrhenius activation energy of about 67-75 kJ/mol, a value which is in agreement with activation energies reported for low-temperature planar growth of GaAs from TMG and AsH3. The Au acts as a local catalyst and as a collector of reactants, enabling a liquid-phase-epitaxy-like growth with high growth rates at the GaAs (111)B/(Au,Ga) interface. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:18 / 22
页数:5
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