Compact diffractive interferometric displacement sensor in reflection

被引：46

作者：

Jourlin, Y ^{[1
]}

Jay, J ^{[1
]}

Parriaux, O ^{[1
]}

机构：

[1] Univ St Etienne, Lab TSI, CNRS, UMR 5516, 23 Rue Dr Paul Michelon, F-42023 St Etienne, France

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2002年 / 26卷 / 01期

关键词：

optical encoder; gratings; microsystems;

D O I：

10.1016/S0141-6359(01)00081-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A displacement measurement technology of diffractive interferometry has been developed in the objective of miniaturization. The interference principle has been implemented in the form of a miniature read head prototype according to a novel device configuration after a discussion on the fabrication and mouting tolerances has been made conducting to a high resolution micro-optical encoder. A read-out grating acting simultaneously as a subwavelength and a two order grating enables the miniaturization of a diffractive interferometric optical displacement sensor of the reflection type. (C) 2001 Elsevier Science Inc. All rights reserved.

引用

页码：1 / 6

页数：6

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