Surface acoustic wave velocity in single-crystal AIN substrates

被引：77

作者：

Bu, G ^{[1
]}

Ciplys, D

Shur, M

Schowalter, LJ

Schujman, S

Gaska, R

机构：

[1] Rensselaer Polytech Inst, Dept Elect Comp & Syst Engn, Troy, NY 12180 USA

[2] Vilnius Univ, Dept Radiophys, LT-2040 Vilnius, Lithuania

[3] Crystal IS Inc, Latham, NY 12210 USA

[4] Sensor Elect Technol Inc, Columbia, SC 29209 USA

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2006年 / 53卷 / 01期

基金：

美国国家航空航天局;

关键词：

D O I：

10.1109/TUFFC.2006.1588412

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AIN) single crystals using the S-11-parameter method in the frequency range 160-360 MHz. The SAW velocity is 5760 m/s for both orientations. From comparison of this value with the simulations using various elastic constants of AIN available in literature, we estimated the elastic constant C-44 to be 122 +/- 1 GPa.

引用

页码：251 / 254

页数：4

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