Temperature coefficient of SAW frequency in single crystal bulk AIN

被引：39

作者：

Bu, G ^{[1
]}

Ciplys, D

Shur, M

Schowalter, LJ

Schujman, S

Gaska, R

机构：

[1] Rensselaer Polytech Inst, Dept Elect Comp & Syst Engn, Troy, NY 12180 USA

[2] Crystal IS Inc, Latham, NY 12110 USA

[3] Sensor Elect Technol Inc, Columbia, SC 29209 USA

[4] Vilnius State Univ, Dept Radiophys, LT-2040 Vilnius, Lithuania

来源：

ELECTRONICS LETTERS | 2003年 / 39卷 / 09期

关键词：

D O I：

10.1049/el:20030488

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The temperature coefficient of frequency (TCF) for surface acoustic waves (SAW) propagating on (0001) bulk AlN single crystal has been measured at 358 MHz in the temperature range 25-70degreesC. The TCF value - 19 ppm/degrees is in agreement with the value estimated from the temperature coefficients of the AlN elastic constants. This value is considerably smaller than temperature coefficients of many materials currently used for SAW substrates.

引用

页码：755 / 757

页数：3

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