Hardness measurement of thin films: Separation from composite hardness

被引：35

作者：

He, JL

Li, WZ

Li, HD

机构：

[1] Dept. of Mat. Sci. and Engineering, Tsinghua University

来源：

APPLIED PHYSICS LETTERS | 1996年 / 69卷 / 10期

关键词：

D O I：

10.1063/1.117595

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A composite hardness model based on the function of depth weight factor is presented. The model can be applied to determine the characteristic hardness of surface coatings which are too thin for the hardness to be directly measured. Its application requires only composite hardness data obtained from coated specimens by conventional microhardness measurement. DLC, TiN, and Cu films on substrates of glass, silicon, and AISI 52100 steel were used to verify this composite hardness model. It proved valid for a variety of cases. (C) 1996 American Institute of Physics.

引用

页码：1402 / 1404

页数：3

共 10 条

[1]

BRUNETT PJ, 1987, THIN SOLID FILMS, V148, P41

[2]

BRUNETT PJ, 1987, THIN SOLID FILMS, V148, P51

[3]

Buckle H., 1973, The science of hardness testing and its research applications, P453

[4] SURFACE SOFTENING IN SILICON BY ION-IMPLANTATION [J].