AlxGa1-xN (0<=x<=1) ultraviolet photodetectors grown on sapphire by metal-organic chemical-vapor deposition.

被引:128
作者
Walker, D [1 ]
Zhang, X [1 ]
Saxler, A [1 ]
Kung, P [1 ]
Xu, J [1 ]
Razeghi, M [1 ]
机构
[1] USAF,WRIGHT LAB,MAT DIRECTORATE,WRIGHT PATTERSON AFB,OH 45433
关键词
D O I
10.1063/1.118450
中图分类号
O59 [应用物理学];
学科分类号
摘要
AlxGa1-xN (0 less than or equal to x less than or equal to 1) ultraviolet photoconductors with cutoff wavelengths from 365 to 200 nm have been fabricated and characterized. The maximum detectivity reached 5.5 x 10(8) cmHz(1/2)/W at a modulating frequency of 14 Hz. The effective majority carrier lifetime in AlxGa1-xN materials, derived from frequency-dependent photoconductivity measurements, has been estimated to be from 6 to 35 ms. The frequency-dependent noise spectrum shows that it is dominated by Johnson noise at high frequencies for low-Al-composition samples. (C) 1997 American Institute of Physics.
引用
收藏
页码:949 / 951
页数:3
相关论文
共 5 条
  • [1] N-VACANCIES IN ALXGA1-XN
    JENKINS, DW
    DOW, JD
    TSAI, MH
    [J]. JOURNAL OF APPLIED PHYSICS, 1992, 72 (09) : 4130 - 4133
  • [2] Kinetics of photoconductivity in n-type GaN photodetector
    Kung, P
    Zhang, X
    Walker, D
    Saxler, A
    Piotrowski, J
    Rogalski, A
    Razeghi, M
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (25) : 3792 - 3794
  • [3] Semiconductor ultraviolet detectors
    Razeghi, M
    Rogalski, A
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (10) : 7433 - 7473
  • [4] AlGaN ultraviolet photoconductors grown on sapphire
    Walker, D
    Zhang, X
    Kung, P
    Saxler, A
    Javadpour, S
    Xu, J
    Razeghi, M
    [J]. APPLIED PHYSICS LETTERS, 1996, 68 (15) : 2100 - 2101
  • [5] GROWTH OF ALXGA1-XN-GE ON SAPPHIRE AND SILICON SUBSTRATES
    ZHANG, X
    KUNG, P
    SAXLER, A
    WALKER, D
    WANG, TC
    RAZEGHI, M
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (12) : 1745 - 1747