On the nature of grain boundary defects in high quality CVD diamond films and their influence on physical properties

被引:36
作者
Steeds, JW [1 ]
Gilmore, A
Bussmann, KM
Butler, JE
Koidl, P
机构
[1] Univ Bristol, Dept Phys, Bristol BS8 1TL, Avon, England
[2] USN, Res Labs, Washington, DC 20375 USA
[3] Fraunhofer Inst Angew Festkorperphys, D-79108 Freiburg, Germany
关键词
transmission electron microscopy; CVD diamond; defects; thermal conductivity; field emission;
D O I
10.1016/S0925-9635(98)00425-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Transmission electron microscopy samples have been prepared from high quality, thick (>100 mu m) CVD diamond films in order to undertake a detailed study of the regions adjacent to the columnar grain boundaries. Using both weak beam and strong matrix diffracted beams and also twin reflections in carefully chosen crystal orientations, it has been possible to show that the boundaries that appear defect-free at first sight are in fact associated with considerable defect densities of characteristic types. These defects have been analysed and the results are presented. An attempt is made to correlate these observations with the anisotropy and temperature dependence of the thermal conductivity of the films and also with their field-emission properties. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:996 / 1005
页数:10
相关论文
共 16 条
[1]   THERMAL-PROPERTIES OF C/H-GROWN, C/H/O-GROWN, C/H/N-GROWN AND C/H/X-GROWN POLYCRYSTALLINE CVD DIAMOND [J].
BACHMANN, PK ;
HAGEMANN, HJ ;
LADE, H ;
LEERS, D ;
WIECHERT, DU ;
WILSON, H ;
FOURNIER, D ;
PLAMANN, K .
DIAMOND AND RELATED MATERIALS, 1995, 4 (5-6) :820-826
[2]  
BACHMANN PK, 1994, MATER RES SOC SYMP P, V339, P267, DOI 10.1557/PROC-339-267
[3]  
Funer M, 1998, APPL PHYS LETT, V72, P1149, DOI 10.1063/1.120997
[4]   PHONON-SCATTERING IN CHEMICAL-VAPOR-DEPOSITED DIAMOND [J].
GRAEBNER, JE ;
REISS, ME ;
SEIBLES, L ;
HARTNETT, TM ;
MILLER, RP ;
ROBINSON, CJ .
PHYSICAL REVIEW B, 1994, 50 (06) :3702-3713
[5]   ANISOTROPIC THERMAL-CONDUCTIVITY IN CHEMICAL VAPOR-DEPOSITION DIAMOND [J].
GRAEBNER, JE ;
JIN, S ;
KAMMLOTT, GW ;
BACON, B ;
SEIBLES, L ;
BANHOLZER, W .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (11) :5353-5356
[6]   Influence of thermal barriers on heat flow in high quality chemical vapor deposited diamond [J].
Hartmann, J ;
Costello, M ;
Reichling, M .
PHYSICAL REVIEW LETTERS, 1998, 80 (01) :117-120
[7]  
HEINE V, 1990, GEOMETRY THERMODYNAM
[8]   CRYSTALLINE PERFECTION OF CHEMICAL VAPOR-DEPOSITED DIAMOND FILMS [J].
HETHERINGTON, AV ;
WORT, CJH ;
SOUTHWORTH, P .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (08) :1591-1594
[9]  
LIHL R, 1979, J MICROSC, V118, P89
[10]  
MCNAMARA KM, 1995, J APPL PHYS, V77, P1459