Grain growth and texture evolution in thin films

被引:40
作者
Thompson, CV
Carel, R
机构
来源
GRAIN GROWTH IN POLYCRYSTALLINE MATERIALS II, PTS 1 AND 2 | 1996年 / 204-卷
关键词
D O I
10.4028/www.scientific.net/MSF.204-206.83
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The grain sizes and orientations in polycrystalline films can be manipulated through controlled grain growth with properly chosen film-thickness, and when films are deposited and annealed at properly chosen temperatures, and deposited on properly chosen substrates. Factors causing abnormal grain growth and texture evolution in films can be understood by considering the energetics and crystallographic dependencies of surface, interface and strain energy minimization. Expected and observed results can be catalogued in the form of texture maps, which can be used in materials selection and process design for optimized film properties and performance.
引用
收藏
页码:83 / 98
页数:16
相关论文
共 37 条
[1]  
ABERMAN R, 1985, THIN SOLID FILMS, V129, P17
[2]   COMPUTER-SIMULATION OF GRAIN-GROWTH .1. KINETICS [J].
ANDERSON, MP ;
SROLOVITZ, DJ ;
GREST, GS ;
SAHNI, PS .
ACTA METALLURGICA, 1984, 32 (05) :783-791
[3]   THEORIES OF NORMAL GRAIN-GROWTH IN PURE SINGLE-PHASE SYSTEMS [J].
ATKINSON, HV .
ACTA METALLURGICA, 1988, 36 (03) :469-491
[4]  
BARMAK K, 1994, MAT RES SOC S P, V343
[5]  
CAREL R, 1994, MATER RES SOC SYMP P, V343, P49, DOI 10.1557/PROC-343-49
[6]  
CAREL R, UNPUB
[7]   GRAIN-GROWTH AND STRESS RELIEF IN THIN-FILMS [J].
CHAUDHAR.P .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01) :520-&
[8]   STRESSES AND DEFORMATION PROCESSES IN THIN-FILMS ON SUBSTRATES [J].
DOERNER, MF ;
NIX, WD .
CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1988, 14 (03) :225-268
[9]   COMPETITION BETWEEN STRAIN AND INTERFACE ENERGY DURING EPITAXIAL GRAIN-GROWTH IN AG FILMS ON NI(001) [J].
FLORO, JA ;
THOMPSON, CV ;
CAREL, R ;
BRISTOWE, PD .
JOURNAL OF MATERIALS RESEARCH, 1994, 9 (09) :2411-2424
[10]   NUMERICAL-ANALYSIS OF INTERFACE ENERGY-DRIVEN COARSENING IN THIN-FILMS AND ITS CONNECTION TO GRAIN-GROWTH [J].
FLORO, JA ;
THOMPSON, CV .
ACTA METALLURGICA ET MATERIALIA, 1993, 41 (04) :1137-1147