High frequency properties of Fe-Cr-Ta-N soft magnetic films

被引：60

作者：

Jin, S ^{[1
]}

Zhu, W ^{[1
]}

vanDover, RB ^{[1
]}

Tiefel, TH ^{[1
]}

Korenivski, V ^{[1
]}

Chen, LH ^{[1
]}

机构：

[1] KAOHSIUNG POLYTECH INST,KAOHSIUNG,TAIWAN

来源：

APPLIED PHYSICS LETTERS | 1997年 / 70卷 / 23期

关键词：

D O I：

10.1063/1.119120

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

High frequency magnetic properties of a new, soft magnetic Fe-Cr-Ta-N alloy film have been investigated. Thin films with a composition of Fe-4.6% Cr-0.2% Ta-7.4% N (in atomic %) were prepared by reactive sputtering in a nitrogen-containing atmosphere. The films, most likely nanocrystalline, exhibit excellent soft magnetic properties in the as-deposited condition without any post heat treatment, e.g., H-c as low as 1.2 Oe (95.3 A/m) and 4 pi M-s similar to 20 kG. The easy-axis M-H loop is square. The hard-axis loop is linear and closed, with the anisotropy field H-a = 20-100 Oe (1.59-7.95 kA/m). By virtue of their high 4 pi M-s and relatively high H-a, these soft magnetic films exhibit high permeability and low loss in the GHz frequency range with the undesirable ferromagnetic resonance interference suppressed to beyond 2 GHz. (C) 1997 American Institute of Physics.

引用

页码：3161 / 3163

页数：3

共 11 条

[1] MICROSTRUCTURE AND MAGNETIC-PROPERTIES OF FETAN FILMS [J].