Integration of Reactive Polymeric Nanofilms Into a Low-Power Electromechanical Switch for Selective Chemical Sensing

被引：19

作者：

Arora, William J. ^{[1
]}

Tenhaeff, Wyatt E. ^{[2
]}

Gleason, Karen K. ^{[2
]}

Barbastathis, George ^{[3
]}

机构：

[1] MIT, Inst Soldier Nanotechnol, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

[2] MIT, Inst Soldier Nanotechnol, Dept Chem Engn, Cambridge, MA 02139 USA

[3] MIT, Inst Soldier Nanotechnol, Dept Mech Engn, Cambridge, MA 02139 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2009年 / 18卷 / 01期

基金：

美国国家科学基金会;

关键词：

Chemical-vapor deposition (CVD); microsensors; thin films; three-dimensional nanomanufacturing; VAPOR-DEPOSITION; CANTILEVER ARRAY; CALORIMETRY; DESIGN;

D O I：

10.1109/JMEMS.2008.2008529

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the fabrication and demonstration of an ultrathin microelectromechanical chemical sensing device. Microcantilevers are etched from 100-nm-thick silicon nitride, and a 75-nm-thick reactive copolymer film for sensing is deposited by initiated chemical vapor deposition. Cross-linking densities of the polymer films are controlled during the deposition process; it is shown that greater cross-linking densities yield greater cantilever deflections upon the polymer's reaction with the analyte. Considering that chemical reactions are necessary for stress formation, the sensing is selective. Cantilever deflections of greater than 3 mu m are easily attained, which allow a simple switch to be designed with resistance-based outputs. When exposed to a hexylamine vapor-phase concentration of 0.87 mol%, the resistance of the switch drops by over six orders of magnitude with a response time of less than 90 s. [2008-0132]

引用

页码：97 / 102

页数：6

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