Focused Flow Micropump Using Ultrasonic Flexural Plate Waves

被引：35

作者：

Meng, Audra H. ^{[1
]}

Nam-Trung Nguyen ^{[1
]}

White, Richard M. ^{[1
]}

机构：

[1] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

来源：

BIOMEDICAL MICRODEVICES | 2000年 / 2卷 / 03期

关键词：

ultrasonic; flexural; focused; microfluidic; micromachine;

D O I：

10.1023/A:1009905926740

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

In this paper, a micromachined pump is presented that uses ultrasonic flexural plate waves traveling along a thin membrane to excite an acoustic field in the fluid that is in contact with the membrane. The acoustic field generates fluid flow by the mechanism of acoustic streaming. A novel combination of radial transducers and unidirectional fluid flow produces a fluid micropump capable of achieving flow speeds up to 1.15 millimeters per second, much faster than flow speeds previously obtained. In addition, the radial transducers successfully focused 2-micron polystyrene spheres over a beam waist of less than 100 microns. Also presented are techniques used to characterize thipt>

引用

页码：169 / 174

页数：6

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