Switching and programming dynamics in phase-change memory cells

被引:46
作者
Ielmini, D
Mantegazza, D
Lacaita, AL
Pirovano, A
Pellizzer, F
机构
[1] Politecn Milan, Dipartimento Elettron & Informat, I-20133 Milan, Italy
[2] IUNET, I-20133 Milan, Italy
[3] STMicroelectronics, Cent R&D, NVMTD, FTM, I-20041 Agrate Brianza, Italy
[4] CNR, IFN, I-20133 Milan, Italy
关键词
D O I
10.1016/j.sse.2005.10.013
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Emerging phase-change memory (PCM) technology for non-volatile applications presents many potential advantages in terms of scalability, endurance and program/read speed. While several integration issues have still to be solved before achieving volume-production stage, the fundamental physics of chalcogenide switching and phase-change behaviour has still to be comprehensively understood. This paper provides an in-depth analysis of the switching and programming transient in PCM cells. It is shown that the cell parasitic capacitance can lead to a marked current overshoot in the programming transient. As evidenced by experiments, this overshoot is able to melt and quench the active material as in a reset operation. The parasitic reset results in a series distribution of crystalline and amorphous phases after program. The analysis of array cell capacitance instead indicates that no parasitic reset is to be expected, allowing for a localized crystallization during program, as previously obtained by numerical Simulations. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1826 / 1832
页数:7
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