Ultrahigh-quality photonic crystal cavity in GaAs

被引：37

作者：

Herrmann, R ^{[1
]}

Sünner, T ^{[1
]}

Hein, T ^{[1
]}

Löffler, A ^{[1
]}

Kamp, M ^{[1
]}

Forchel, A ^{[1
]}

机构：

[1] Univ Wurzburg, Lehrstuhl Tech Phys, D-97074 Wurzburg, Germany

来源：

OPTICS LETTERS | 2006年 / 31卷 / 09期

关键词：

D O I：

10.1364/OL.31.001229

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Membrane-based photonic crystal GaAs cavities with a double-heterostructure design were investigated. They show the highest quality factors for GaAs photonic crystal cavities to date, exhibiting quality factors higher than 10(5). The resonances of these cavities were fine-tuned in steps smaller than 2 nm by digital etching. (c) 2006 Optical Society of America.

引用

页码：1229 / 1231

页数：3

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