Growth of (111)-oriented PZT on RuO2(100)/Pt(111) electrodes by in-situ sputtering

被引：28

作者：

Maeder, T ^{[1
]}

Muralt, P ^{[1
]}

Sagalowicz, L ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Dept Mat, Lab Ceram, CH-1015 Lausanne, Switzerland

来源：

THIN SOLID FILMS | 1999年 / 345卷 / 02期

关键词：

PZT; sputtering;

D O I：

10.1016/S0040-6090(98)01420-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Growth of (111)-oriented Pb(Zr,Ti)O-3 has been achieved on a RuO2 film which was (100) textured. This texture could be obtained by using a (111)-textured Pt film as a template. The whole layer stack was grown on an amorphous SiO2 layer, that is a thermal oxide of a silicon wafer. A good (111)-orientation of the Pt template layer is thus the starting point of oriented growth. XRD and TEM studies have been carried out to find the orientation relationship between Pt(111), RuO2(100) and PZT(111). (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：300 / 306

页数：7

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