Vertically aligned carbon nanofiber-based field emission electron sources with an integrated focusing electrode

被引：51

作者：

Guillorn, MA ^{[1
]}

Yang, X

Melechko, AV

Hensley, DK

Hale, MD

Merkulov, VI

Simpson, ML

Baylor, LR

Gardner, WL

Lowndes, DH

机构：

[1] Oak Ridge Natl Lab, Mol Scale Engn & Nanoscale Technol Res Grp, Oak Ridge, TN 37831 USA

[2] Oak Ridge Natl Lab, Div Fus Energy, Oak Ridge, TN 37831 USA

[3] Oak Ridge Natl Lab, Thin Film & Nanostructed Mat Phys Res Grp, Div Solid State, Oak Ridge, TN 37831 USA

[4] Univ Tennessee, Dept Mat Sci & Engn, Knoxville, TN 37996 USA

[5] Univ Tennessee, Dept Elect & Comp Engn, Knoxville, TN 37996 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2004年 / 22卷 / 01期

关键词：

D O I：

10.1116/1.1633768

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the design, fabrication, and initial characterization of vertically aligned carbon nanofiber-based microfabricated field emission devices with an integrated out-of-plane electrostatic focusing electrode. The potential placed on this electrode was found to have a profound impact on the diameter of the beam emitted from the device as observed on a phosphor screen. Aspects of the device fabrication process and device operation are discussed. The experimental results obtained are compared to a numerical simulation of device performance and found to be within good agreement. (C) 2004 American Vacuum Society.

引用

页码：35 / 39

页数：5

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