Mossbauer study of the Fe-Si phases produced by Fe implantation followed by ion-beam-induced epitaxial crystallization

被引：16

作者：

Desimoni, J

Sanchez, FH

vanRaap, MBF

Lin, XW

Bernas, H

Clerc, C

机构：

[1] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,DIV MAT SCI,BERKELEY,CA 94720

[2] CTR SPECTROMETRIE NUCL & SPECTROMETRIE MASSE,ORSAY,FRANCE

来源：

PHYSICAL REVIEW B | 1996年 / 54卷 / 18期

关键词：

D O I：

10.1103/PhysRevB.54.12787

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Iron silicides were produced by 100-keV Fe-57 implantation at room temperature into Si(100), followed by 500-keV Si beam irradiation at 593 K to induce epitaxial crystallization. The iron concentration was varied between 4 and 28 at. %. The Mossbauer spectra associated with Fe-57 probes can be described by means of a broad quadrupole interaction distribution. After thermal treatments at temperatures up to 793 K the spectra become narrower and quadrupole distribution gets closer to that of beta-FeSi2. The fitted interactions are discussed in terms of those of gamma-FeSi2, beta-FeSi2, and alpha-FeSi2 phases which have been observed by high-resolution transmission electron microscopy. Low-temperature measurements of gamma-FeSi2 precipitates prepared by the ion-beam-induced epitaxial crystallization route do not confirm the reported occurrence of magnetic ordering in this system, above 4.2 K.

引用

页码：12787 / 12792

页数：6

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