Characterization of PZT thin films prepared by a modified sol-gel method

被引：8

作者：

Matthes, B ^{[1
]}

Tomandl, G ^{[1
]}

Werner, G ^{[1
]}

机构：

[1] Freiberg Univ Min & Technol, Inst Ceram Mat, D-09596 Freiberg, Germany

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 1999年 / 19卷 / 6-7期

关键词：

sol-gel processes; PZT;

D O I：

10.1016/S0955-2219(98)00442-7

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Lead zirconate titanate (PZT) thin films with thicknesses of around 5 mu m were prepared by the deposition a sol slurry. This sol slurry consists of a PZT-sol on acetic acid basis and PZT powder. The sol serves as the dispersion agent of the powder. Both are identical in composition with molar ratio Zr/Ti of 0.53/0.47. Lead in excess of 5% was used in all samples. This coating conditions enhance the possibilities of film preparation. (C) 1999 Elsevier Science Limited. All rights reserved.

引用

页码：1387 / 1389

页数：3

共 6 条

[1]

Budd K. D., 1985, British Ceramic Proceedings, P107

[2] EPITAXIAL-GROWTH OF THIN-FILMS OF BATIO3 USING EXCIMER LASER ABLATION [J].

DAVIS, GM ;

GOWER, MC .

APPLIED PHYSICS LETTERS, 1989, 55 (02) :112-114

[3] RF PLANAR MAGNETRON SPUTTERING AND CHARACTERIZATION OF FERROELECTRIC PB(ZR,TI)O3 FILMS [J].

KRUPANIDHI, SB ;

MAFFEI, N ;

SAYER, M ;

ELASSAL, K .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) :6601-6609

[4]

MATTHES B, 1997, ECERS 5 KEY ENG MAT, V132, P1139

[5] ELECTRICAL-PROPERTIES OF LEAD-ZIRCONATE-LEAD-TITANATE FERROELECTRIC THIN-FILMS AND THEIR COMPOSITION ANALYSIS BY AUGER-ELECTRON SPECTROSCOPY [J].

OKADA, A .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (08) :4495-4499

[6] METALLOORGANIC DECOMPOSITION (MOD) PROCESSING OF FERROELECTRIC AND ELECTROOPTIC FILMS - A REVIEW [J].

VEST, RW .

FERROELECTRICS, 1990, 102 :53-68

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