Error analysis of the phase-shifting technique when applied to shadow moire

被引：21

作者：

Han, CW ^{[1
]}

Han, BT

机构：

[1] Korea Elect Technol Inst, Reliabil & Failure Anal Ctr, Seongnam 463816, South Korea

[2] Univ Maryland, Dept Mech Engn, College Pk, MD 20742 USA

来源：

APPLIED OPTICS | 2006年 / 45卷 / 06期

关键词：

D O I：

10.1364/AO.45.001124

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An exact solution for the intensity distribution of shadow moire fringes produced by a broad spectrum light is presented. A mathematical study quantifies errors in fractional fringe orders determined by the phase-shifting technique, and its validity is corroborated experimentally. The errors vary cyclically as the distance between the reference grating and the specimen increases. The amplitude of the maximum error is approximately 0.017 fringe, which defines the theoretical limit of resolution enhancement offered by the phase-shifting technique. (c) 2006 Optical Society of America.

引用

页码：1124 / 1133

页数：10

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