Structural study of amorphous In2O3 film by grazing incidence X-ray scattering (GIXS) with synchrotron radiation

Grazing incidence X-ray scattering (GIXS) using synchrotron radiation is a very useful method for structural analysis of amorphous films, We investigated the structure of amorphous In2O3 film utilizing GIXS at BL19B2 in SPring-8. Radial distribution function (RDF) was obtained from the measurement data. Structural models were constructed by molecular dynamics (MD) and reverse Monte-Carlo (RMC) simulations, and the calculated RDFs from the simulations were compared with that observed. It was found that the average oxygen coordination number around In ions was almost 6 and the average length 2.12 angstrom, which was smaller by about 3% than that of 2.18 angstrom in crystalline In2O3, It was concluded that the atomic arrangement of the amorphous In2O3 was characterized by the increase in the number and the boarder angle of distribution of corner-sharing In-O-In bond compared with crystalline In2O3. (c) 2005 Elsevier B,V. All rights reserved.