ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS INDIUM OXIDE

被引:250
作者
BELLINGHAM, JR
PHILLIPS, WA
ADKINS, CJ
机构
[1] Cavendish Lab., Cambridge
关键词
D O I
10.1088/0953-8984/2/28/011
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The authors present a detailed analysis of the electrical and optical properties of amorphous transparent conducting thin films of indium oxide prepared by ion beam sputtering with a wide range of carrier concentrations. They show that the resistivity is dominated by ionised impurity scattering despite the amorphous structure of the films. The weak effect of the structural disorder is confirmed by studies of the interband absorption and is explained by a consideration of the relative length scales of the structural disorder and the Fermi wavelength.
引用
收藏
页码:6207 / 6221
页数:15
相关论文
共 30 条
[1]   ION-BEAM SPUTTERED INDIUM TIN OXIDE FOR INP SOLAR-CELLS [J].
AHARONI, H ;
COUTTS, TJ ;
GESSERT, T ;
DHERE, R ;
SCHILLING, L .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :428-431
[2]  
Brooks H., 1955, ADV ELECTRON, V7, P85
[3]   ANOMALOUS OPTICAL ABSORPTION LIMIT IN INSB [J].
BURSTEIN, E .
PHYSICAL REVIEW, 1954, 93 (03) :632-633
[4]   ELECTRON-STATES IN ALPHA-QUARTZ - SELF-CONSISTENT PSEUDOPOTENTIAL CALCULATION [J].
CHELIKOWSKY, JR ;
SCHLUTER, M .
PHYSICAL REVIEW B, 1977, 15 (08) :4020-4029
[5]   INFRARED TRANSPARENT AND ELECTRICALLY CONDUCTIVE THIN-FILM OF IN2O3 [J].
CHEN, TC ;
MA, TP ;
BARKER, RC .
APPLIED PHYSICS LETTERS, 1983, 43 (10) :901-903
[6]   ELECTROOPTICAL PROPERTIES OF THIN INDIUM TIN OXIDE-FILMS - LIMITATIONS ON PERFORMANCE [J].
DHERE, RG ;
GESSERT, TA ;
SCHILLING, LL ;
NELSON, AJ ;
JONES, KM ;
AHARONI, H ;
COUTTS, TJ .
SOLAR CELLS, 1987, 21 :281-290
[7]  
DINGLE RB, 1955, PHILOS MAG, V46, P831
[8]  
ELLIOTT SR, 1984, PHYSICS AMORPHOUS MA
[9]   PREPARATION OF SN-DOPED IN2O3 (ITO) FILMS AT LOW DEPOSITION TEMPERATURES BY ION-BEAM SPUTTERING [J].
FAN, JCC .
APPLIED PHYSICS LETTERS, 1979, 34 (08) :515-517
[10]   EFFECT OF O2 PRESSURE DURING DEPOSITION ON PROPERTIES OF RF-SPUTTERED SN-DOPED IN2O3 FILMS [J].
FAN, JCC ;
BACHNER, FJ ;
FOLEY, GH .
APPLIED PHYSICS LETTERS, 1977, 31 (11) :773-775