Field-emission triode of low-temperature synthesized ZnO nanowires

被引:34
作者
Lee, Chia Ying [1 ]
Li, Seu Yi
Lin, Pang
Tseng, Tseung-Yuen
机构
[1] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 30050, Taiwan
[2] Natl Chiao Tung Univ, Inst Elect, Hsinchu 30050, Taiwan
[3] Natl Chiao Tung Univ, Inst Mat Sci & Engn, Hsinchu 30049, Taiwan
关键词
field-emission triode and device; hydrothermal method; nanowires (NWs); ZnO;
D O I
10.1109/TNANO.2006.874049
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A field-emission triode based on the low-temperature (75 degrees C) and hydrothermally synthesized single-crystalline zinc-oxide nanowires; (ZnO NWs) grown on Si substrate with a silicon dioxide (SiO2) insulator was fabricated for the controllable field-emission device application. Field-emission measurement reveals that the ZnO NWs fabricated on the Si substrate exhibit a good emission property with the turn-on electric field and threshold electric field (current density of 1 mA/cm(2)) of 1.6 and 2.1 V/mu m, respectively, with a field enhancement factor beta of 3340. The field-emission properties of the ZnO NW-based triode exhibit the controllable characteristics. The well-controlled field-emission characteristics can be divided into three parts: gate leakage region, linear region, and saturation region. Therefore, this study provides a low-temperature field-emission triode fabrication process that is compatible with the Si-based microelectronic integration, and the field-emission measurements also reveal that the emission behavior can be well controlled by adopting the triode structure.
引用
收藏
页码:216 / 219
页数:4
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