Silicon nanomechanical resonators with a double-triangle cross section leading to an enhanced mass sensitivity

被引:4
作者
De Vlaminck, I [1 ]
De Greve, K [1 ]
Lagae, L [1 ]
Borghs, G [1 ]
机构
[1] IMEC, B-3001 Louvain, Belgium
关键词
D O I
10.1063/1.2172236
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on a silicon nanomechanical resonator fabricated with a double-triangle cross section, leading to an enhanced mass sensing capabilities. We analytically derive the dependence of the mass detection limit on, respectively, the moment of inertia and the cross section of a beam resonator. We conclude that our scaling compatible fabrication scheme can yield an enhancement of as much as 2.3 with regard to regular, rectangular resonators of the same size. We experimentally confirm the shape dependence of the resonant frequency and maximum drive energy, supporting our model for the mass detection limit.
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页数:3
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共 15 条
[1]   Measurement of mechanical resonance and losses in nanometer scale silicon wires [J].
Carr, DW ;
Evoy, S ;
Sekaric, L ;
Craighead, HG ;
Parpia, JM .
APPLIED PHYSICS LETTERS, 1999, 75 (07) :920-922
[2]   Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals [J].
Cleland, AN ;
Roukes, ML .
APPLIED PHYSICS LETTERS, 1996, 69 (18) :2653-2655
[3]   External control of dissipation in a nanometer-scale radiofrequency mechanical resonator [J].
Cleland, AN ;
Roukes, ML .
SENSORS AND ACTUATORS A-PHYSICAL, 1999, 72 (03) :256-261
[4]  
DEVLAMINCK I, 2005, P NSTI NAN C NSTI AN, V2, P297
[5]   Nanoelectromechanical systems [J].
Ekinci, KL ;
Roukes, ML .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (06)
[6]   Ultrasensitive nanoelectromechanical mass detection [J].
Ekinci, KL ;
Huang, XMH ;
Roukes, ML .
APPLIED PHYSICS LETTERS, 2004, 84 (22) :4469-4471
[7]   Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems [J].
Ekinci, KL ;
Yang, YT ;
Roukes, ML .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (05) :2682-2689
[8]   Nanofabrication and electrostatic operation of single-crystal silicon paddle oscillators [J].
Evoy, S ;
Carr, DW ;
Sekaric, L ;
Olkhovets, A ;
Parpia, JM ;
Craighead, HG .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (11) :6072-6077
[9]   Thickness and temperature dependence of stress relaxation in nanoscale aluminum films [J].
Hyun, S ;
Brown, WL ;
Vinci, RP .
APPLIED PHYSICS LETTERS, 2003, 83 (21) :4411-4413
[10]   Nonlinear limits for single-crystal silicon microresonators [J].
Kaajakari, V ;
Mattila, T ;
Oja, A ;
Seppä, H .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2004, 13 (05) :715-724