Non-volatility of ferroelectric SBT thin fims, at 75°C

被引：3

作者：

Jiménez, R ^{[1
]}

González, A ^{[1
]}

Alemany, C ^{[1
]}

Calzada, ML ^{[1
]}

Mendiola, J ^{[1
]}

机构：

[1] CSIC, Inst Ciencia Mat Madrid, Madrid 28049, Spain

来源：

BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO | 2002年 / 41卷 / 01期

关键词：

NVFeRAM; SBT; temperature;

D O I：

10.3989/cyv.2002.v41.i1.691

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The study of the non-volatility of Strontium bismuth tantalate SrBi2Ta2O9 (SBT) FeRAM memory at real operating conditions, requires the ferroelectric characterisation of the material, as a thin film, above the room temperature. As a result, it has been deposited SBT films by the sol-gel method, onto Pt/TiO2/SiO2/Si (100) substrates, using capacitors of 5 x 10(-4) cm(-2). In this work, we analysed the viability of this material as a FeRAM memory in real operating conditions, as a result of the variation of the polarisation measurements with time (retention), performed at room temperature and 75degreesC.

引用

收藏

页码：22 / 26

页数：5

相关论文

共 10 条

[1] Pulsed hysteresis loops on ferroelectric thin films [J].

Alemany, C ;

Jiménez, R ;

Revilla, J ;

Mendiola, J ;

Calzada, ML .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1999, 32 (17) :L79-L82

[2] Rapid thermal processing of strontium bismuth tantalate ferroelectric thin films prepared by a novel chemical solution deposition method [J].

Calzada, ML ;

González, A ;

Jiménez, R ;

Alemany, C ;

Mendiola, J .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2001, 21 (10-11) :1517-1520

[3] Air-stable solutions for the low-temperature crystallization of strontium bismuth tantalate ferroelectric films [J].

Calzada, ML ;

Jiménez, R ;

González, A ;

Mendiola, J .

CHEMISTRY OF MATERIALS, 2001, 13 (01) :3-+

[4]

Dat R., 1994, Integrated Ferroelectrics, V5, P275, DOI 10.1080/10584589408223884

[5] PHOTOINDUCED HYSTERESIS CHANGES AND OPTICAL STORAGE IN (PB,LA)(ZR,TI)O3 THIN-FILMS AND CERAMICS [J].

DIMOS, D ;

WARREN, WL ;

SINCLAIR, MB ;

TUTTLE, BA ;

SCHWARTZ, RW .

JOURNAL OF APPLIED PHYSICS, 1994, 76 (07) :4305-4315

[6]

*FERAM, 2001, PHYS BLATTER, V57, P18

[7] USE OF LOW-FREQUENCY SINUSOIDAL TEMPERATURE WAVES TO SEPARATE PYROELECTRIC CURRENTS FROM NONPYROELECTRIC CURRENTS .1. THEORY [J].

GARN, LE ;

SHARP, EJ .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (12) :8974-8979

[8] Conditioning effects on RTP (Pb,Ca)TiO3 thin films [J].

Jiménez, R ;

Calzada, ML ;

Mendiola, J .

THIN SOLID FILMS, 1998, 335 (1-2) :292-298

[9] CHARACTERISTICS OF BISMUTH LAYERED SRBI2TA2O9 THIN-FILM CAPACITORS AND COMPARISON WITH PB(ZR,TI)O-3 [J].

MIHARA, T ;

YOSHIMORI, H ;

WATANABE, H ;

DEARAUJO, CAP .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (9B) :5233-5239

[10]

Scott JF., 2000, SPRINGER SERIES ADV