A Raman study of diamond film growth on co-cemented tungsten carbide

被引:13
作者
Polini, R
Traversa, E
Marucci, A
Mattei, G
Marcheselli, G
机构
[1] CNR,INST METODOL AVANZATE INORGAN,I-00016 MONTEROTONDO,ROMA,ITALY
[2] FABBRICA ITALIANA LEGHE MET SINTERIZZATE FILMS SP,I-28020 ANZOLA DOSSOLO,NOVARA,ITALY
关键词
D O I
10.1149/1.1837598
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Phase purity and crystallinity of diamond films grown by hot filament chemical vapor deposition on ISO-grade K10 cemented carbide [94.2 weight percent (w/o) WC-5.8 w/o Co] were studied by Raman spectroscopy as a function of substrate temperature, gas phase composition, and substrate pretreatments. High-quality diamond films were grown using 0.5% CH4/H-2 in a rather narrow range of substrate temperatures (750 to 760 degrees C). In all the deposited coatings, the first-order Raman band of diamond is detected at 1337 cm. This fact indicates that a 2 GPa residual compressive stress is present in the diamond phase. The linewidth of the diamond Raman peak increases with deposition temperature. This effect has been ascribed to a higher density of defects in diamond crystallites. It has been observed that Co removal from the substrate surface by wet chemical etching before deposition is less effective than a careful selection of deposition parameters to reduce the codeposition of nondiamond carbon phases. This finding has been attributed to the fast diffusion of the binder from the bulk to the substrate surface, even for the etched substrates.
引用
收藏
页码:1371 / 1375
页数:5
相关论文
共 39 条
[1]   QUANTITATIVE MEASUREMENT OF RESIDUAL BIAXIAL STRESS BY RAMAN-SPECTROSCOPY IN DIAMOND GROWN ON A TI ALLOY BY CHEMICAL-VAPOR-DEPOSITION [J].
AGER, JW ;
DRORY, MD .
PHYSICAL REVIEW B, 1993, 48 (04) :2601-2607
[2]   INSTRUMENTAL DISTORTIONS OF RAMAN LINES [J].
ARORA, AK ;
UMADEVI, V .
APPLIED SPECTROSCOPY, 1982, 36 (04) :424-427
[3]   RELATION BETWEEN THE HFCVD DIAMOND GROWTH-RATE, THE LINEWIDTH OF RAMAN-SPECTRUM AND THE PARTICLE-SIZE [J].
ASCARELLI, P ;
CAPPELLI, E ;
MATTEI, G ;
PINZARI, F ;
MARTELLI, S .
DIAMOND AND RELATED MATERIALS, 1995, 4 (04) :464-468
[4]   DECONVOLUTION OF THE LORENTZIAN LINEWIDTH AND DETERMINATION OF FRACTION LORENTZIAN CHARACTER FROM THE OBSERVED PROFILE OF A RAMAN LINE BY A COMPARISON TECHNIQUE [J].
ASTHANA, BP ;
KIEFER, W .
APPLIED SPECTROSCOPY, 1982, 36 (03) :250-257
[5]   OPTICAL CHARACTERIZATION OF DIAMOND [J].
BACHMANN, PK ;
WIECHERT, DU .
DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) :422-433
[6]   RAMAN AND X-RAY STUDIES OF POLYCRYSTALLINE CVD DIAMOND FILMS [J].
BACHMANN, PK ;
BAUSEN, HD ;
LADE, H ;
LEERS, D ;
WIECHERT, DU ;
HERRES, N ;
KOHL, R ;
KOIDL, P .
DIAMOND AND RELATED MATERIALS, 1994, 3 (11-12) :1308-1314
[7]   FRICTION MEASUREMENTS ON HOT-FILAMENT CVD DIAMOND FILMS DEPOSITED ON ETCHED TUNGSTEN CARBIDE SURFACES [J].
EVERITT, NM ;
SILVA, RF ;
VIEIRA, J ;
REGO, CA ;
HENDERSON, CR ;
MAY, PW .
DIAMOND AND RELATED MATERIALS, 1995, 4 (5-6) :730-734
[8]   DETAILED SURFACE AND GAS-PHASE CHEMICAL-KINETICS OF DIAMOND DEPOSITION [J].
FRENKLACH, M ;
WANG, H .
PHYSICAL REVIEW B, 1991, 43 (02) :1520-1545
[9]  
HENCHEN H, 1990, THIN SOLID FILMS, V212, P206
[10]   TRIBOLOGICAL BEHAVIOR OF CHEMICAL VAPOR-DEPOSITION DIAMOND FILMS ON VARIOUS CUTTING TOOLS [J].
HUANG, TH ;
KUO, CT ;
LIN, TS .
SURFACE & COATINGS TECHNOLOGY, 1993, 56 (02) :105-108