A miniature, high-sensitivity, electron tunneling accelerometer

被引：27

作者：

Rockstad, HK

Tang, TK

Reynolds, JK

Kenny, TW

Kaiser, WJ

Gabrielson, TB

机构：

[1] STANFORD UNIV,DEPT MECH ENGN,STANFORD,CA 94305

[2] UNIV CALIF LOS ANGELES,DEPT ELECT ENGN,LOS ANGELES,CA 90024

[3] USN,AIR WARFARE CTR,DIV AIRCRAFT,WARMINSTER,PA 18974

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 53卷 / 1-3期

基金：

美国国家航空航天局;

关键词：

electron tunneling; accelerometers; micromachining; hydrophones; acoustic sensors;

D O I：

10.1016/0924-4247(96)01128-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10(-7) g (Hz)(-1/2) or less between 10 and 200 Hz, and close to 10(-8) g (Hz)(-1/2) near the resonance frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm(3) volume with a mass of 8 g.

引用

页码：227 / 231

页数：5

共 18 条

[1] NOISE-REDUCTION TECHNIQUE FOR SCANNING TUNNELING MICROSCOPY [J].