Design and implementation of integrated BDJ detector in a standard CMOS technology

被引:3
作者
Lu, GN [1 ]
Sou, G [1 ]
Ben Chouikha, M [1 ]
Sedjil, M [1 ]
机构
[1] Univ Paris 06, Lab Instruments & Syst, Paris 05, France
来源
DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2 | 1999年 / 3680卷
关键词
integrated BDJ detector; wavelength-sensitive detection; CMOS technology;
D O I
10.1117/12.341220
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The integrated BDJ (Buried Double p-n Junction) detector basically consists of two buried junctions for collection of photocarriers at different depths. It can operate non only as a photodetector, but also as a wavelength-sensitive detector, because the ratio of the deep junction photocurrent to the shallow junction photocurrent is wavelength-dependent. The BDJ detector can be implemented using a standard CMOS process. The optimum design for a particular application requires divers considerations, such as process parameters, detector sizing, on-chip interface electronics, temperature sensing and compensation, etc. In particular, some geometrical and electrical parameters have significant effects on the device behavior and performances, and detector size as well as on-chip circuitry should be properly defined to meet specifications. Also, temperature-dependence of characteristics may need to be compensated. Two examples concerning design of integrated BDJ detector for specific applications are shown. One is for detecting spectral changes of absorption, while the other is for building a self-calibrated microspectrophotometer.
引用
收藏
页码:358 / 366
页数:9
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