Large piezoelectric effect in lead-free Ba(Zr0.2Ti0.8)O3-(Ba0.7Ca0.3)TiO3 films prepared by screen printing with solution infiltration process

被引：11

作者：

Feng, Zuyong ^{[1
,2
]}

Shi, Dongqi ^{[2
]}

Dou, Shixue ^{[2
]}

Tang, Xingui ^{[1
]}

Hu, Yihua ^{[1
]}

机构：

[1] Guangdong Univ Technol, Sch Phys & Optoelect Engn, Guangzhou 510006, Guangdong, Peoples R China

[2] Univ Wollongong, Inst Superconducting & Elect Mat, N Wollongong, NSW 2500, Australia

来源：

THIN SOLID FILMS | 2013年 / 527卷

基金：

澳大利亚研究理事会;

关键词：

Ferroelectric films; Lead-free; Solution infiltration; Dielectrics and piezoelectricity; THICK-FILMS; LIQUID-PHASE;

D O I：

10.1016/j.tsf.2012.11.066

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High-quality piezoelectric Ba(Zr0.2Ti0.8)O-3-50(Ba0.7Ca0.3)TiO3 films with very dense and homogenous microstructure were fabricated using chemical solution infiltration into porous screen-printed films. The films with a thickness of 10 mu m exhibited high relative permittivity of 2380, low dielectric loss of 1.6% (at 10 kHz), large remanent polarization of 22 mu C/cm(2), and large longitudinal piezoelectric constant d(33) of 220 pC/N, which is even better than the case of lead-based piezoelectric films. The excellent electrical properties make the films a promising candidate for practical applications in lead-free microdevices such as piezoelectric microelectromechanical systems. (C) 2012 Elsevier B. V. All rights reserved.

引用

页码：110 / 113

页数：4

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