Ferroelectric and piezoelectric properties of 0.948(K0.5Na0.5)NbO3-0.052LiSbO3 lead-free piezoelectric thick film by aerosol deposition

被引:76
作者
Ryu, Jungho [1 ]
Choi, Jong-Jin [1 ]
Hahn, Byung-Dong [1 ]
Park, Dong-Soo [1 ]
Yoon, Woon-Ha [1 ]
机构
[1] Korea Inst Mat Sci, Ctr Future Technol, Chang Won 641831, Kyungnam, South Korea
关键词
D O I
10.1063/1.2828892
中图分类号
O59 [应用物理学];
学科分类号
摘要
Lead-free, piezoelectric thick films of 0.948(K0.5Na0.5)NbO3-0.052LiSbO(3) were fabricated by aerosol deposition and the effect of postannealing temperature on the dielectric, ferroelectric, and piezoelectric properties was investigated. The thickness of the films ranged from 5 to 17 mu m and highly dense films were obtained after deposition at room temperature. With increasing annealing temperature, the dielectric and ferroelectric properties were markedly increased. The maximum ferroelectric and dielectric properties of epsilon(T)(3)/epsilon(0)=1012, P-r=15.5 mu C/cm(2), and d(33)=50 pm/V were obtained after annealing at 800 degrees C for 1 h. Above this temperature, the film exhibited rapid property degradation as it was decomposed due to Na2O evaporation. (c) 2008 American Institute of Physics.
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