Modern optical measurement station for micro-materials and micro-elements studies

被引：26

作者：

Kujawinska, M ^{[1
]}

机构：

[1] Warsaw Univ Technol, Inst Micromech & Photon, PL-02525 Warsaw, Poland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 99卷 / 1-2期

关键词：

optical full-field methods; micro-interferometry; waveguide interferometer; micro-materials; micro-elements; optical testing;

D O I：

10.1016/S0924-4247(01)00911-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper gives the overview of various (point and full-field) concepts of optical measurements of micro-elements including micro-electromechanical system (MEMS), micro-optical-electromechanical system (MOEMS) and electronic packages. In particular, it describes waveguide micro-interferometer which enables an alternative usage of conventional interferometry (0) and grating interferometry (GI) (reflective surfaces), ESPI (scattering surfaces) and digital holographic interferometry (DIE) (mixed surfaces) for shape, in-plane and out-of-plane displacement measurements. To prove the applicability of this micro-interferometer, the wide selection of measurement examples is given. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：144 / 153

页数：10

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