Construction of STM aligned electron field emission source

被引:4
作者
Park, JY
Choi, HJ
Lee, Y
Kang, S
Chun, K
Park, SW
Kuk, Y
机构
[1] SEOUL NATL UNIV,DEPT PHYS,SEOUL 151742,SOUTH KOREA
[2] SEOUL NATL UNIV,DEPT ELECT ENGN,SEOUL 151742,SOUTH KOREA
[3] SEOUL CITY UNIV,DEPT CONTROL & INSTRUMENTAT ENGN,SEOUL 130143,SOUTH KOREA
来源
JOURNAL DE PHYSIQUE IV | 1996年 / 6卷 / C5期
关键词
D O I
10.1051/jp4:1996546
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We constructed a scanning tunneling microscope aligned field emission (SAFE) source by using silicon micro-fabricated electrostatic lenses. The system consists of an STM aligned field emitter, 5 mu m extractor, 100 mu m accelerator, beam dump, quadrupole deflector and einzel lens. The microlenses were made by using silicon processing techniques. The system can be operated from 200 to 2 kV, resulting in a beam current of tens of nA and with the diameter of similar to 0.1 mu m when a sample was placed less than 2 mm away from the exiting einzel lens. In order to measure the spherical and chromatic aberrations, a detector and cylindrical electron energy analyzer were attached to the micro-column.
引用
收藏
页码:285 / 289
页数:5
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