Application and calibration of a quartz needle sensor for high resolution scanning force microscopy

被引:20
作者
Clauss, W [1 ]
Zhang, J
Bergeron, DJ
Johnson, AT
机构
[1] Univ Penn, Dept Phys & Astron, Philadelphia, PA 19104 USA
[2] Univ Tubingen, Inst Phys Appl, D-72076 Tubingen, Germany
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 04期
关键词
D O I
10.1116/1.590751
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have investigated a force sensing technique for high-resolution scanning force microscopy which uses a piezoelectric quarts resonator oscillating perpendicular to the direction of the sample surface at a frequency of 1 MHz. The achievement of true atomic resolution on single-wall carbon nanotube surfaces illustrates the promises of this new technique which is especially well suited for ultrahigh vacuum or low-temperature conditions. The force sensitivity and the mechanical amplitude of the sensor oscillation were characterized semiquantitatively. (C) 1999 American Vacuum Society. [S0734-211X(99)08504-2].
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页码:1309 / 1312
页数:4
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