Laser micromachining for manufacturing MEMS devices

被引：15

作者：

Gower, M ^{[1
]}

机构：

[1] Exitech Ltd, Oxford OX8 8LH, England

来源：

MEMS COMPONENTS AND APPLICATIONS FOR INDUSTRY, AUTOMOBILES, AEROSPACE, AND COMMUNICATION | 2001年 / 4559卷

关键词：

laser micromachining; MEMS; MOEMS; biofactory-on-a-chip; microoptics;

D O I：

10.1117/12.443040

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Applications of laser micromachining to the manufacture and prototyping of MEMS and MOEMS devices are presented. Examples of microturbines, biofactory on a chip, microfluidic components and microoptical elements manufactured by laser micromachining are described.

引用

收藏

页码：53 / 59

页数：7

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