Polymer pen lithography

被引：445

作者：

Huo, Fengwei ^{[1
,2
]}

Zheng, Zijian ^{[1
,2
]}

Zheng, Gengfeng ^{[1
,2
]}

Giam, Louise R. ^{[2
,3
]}

Zhang, Hua ^{[1
,2
]}

Mirkin, Chad A. ^{[1
,2
,3
]}

机构：

[1] Northwestern Univ, Dept Chem, Evanston, IL 60208 USA

[2] Northwestern Univ, Int Inst Nanotechnol, Evanston, IL 60208 USA

[3] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA

来源：

SCIENCE | 2008年 / 321卷 / 5896期

关键词：

D O I：

10.1126/science.1162193

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We report a low- cost, high- throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a "direct write" manner. Polymer pen lithography merges the feature size control of dip- pen nanolithography with the large- area capability of contact printing. Because ink delivery is time and force dependent, features on the nanometer, micrometer, and macroscopic length scales can be formed with the same tip array. Arrays with as many as about 11 million pyramid- shaped pens can be brought into contact with substrates and readily leveled optically to ensure uniform pattern development.

引用

页码：1658 / 1660

页数：3

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