Patterning piezoelectric thin film PVDF-TrFE based pressure sensor for catheter application

被引：247

作者：

Sharma, Tushar ^{[1
]}

Je, Sang-Soo ^{[1
]}

Gill, Brijesh ^{[2
]}

Zhang, John X. J. ^{[1
]}

机构：

[1] Univ Texas Austin, Austin, TX 78712 USA

[2] Univ Texas Hlth Sci Ctr Houston, Houston, TX USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2012年 / 177卷

基金：

美国国家科学基金会;

关键词：

Piezoelectricity; Pressure sensor; Thin film PVDF-TrFE; Lithography; Microfabrication; Catheter;

D O I：

10.1016/j.sna.2011.08.019

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report a thin PVDF-TrFE (polyvinyledenedifluoride-trifluoroethylene) copolymer film pressure sensor, fabricated using standard lithography process for cost-effective batch process, film uniformity, and high resolution of polymer patterning. PVDF-TrFE copolymer, a semi-crystalline material, was spin-coated into thin films (1 mu m thick) to tap the near beta-phase formation. Pressure measurements demonstrated that the thin film (1 mu m) show better performance compared to thick film (6 mu m) with no electrical poling or mechanical stretching. Thin film devices showed higher beta phase formation from Raman spectroscopy measurements, which translate into high piezoelectricity for sensing. The sensors can operate over a broad pressure range of 0-300 mmHg, with fast recovery time of 0.17 s, suitable for real time flow measurements in catheter applications. Published by Elsevier B.V.

引用

页码：87 / 92

页数：6

共 13 条

[1] AN ULTRAMINIATURE SOLID-STATE PRESSURE SENSOR FOR A CARDIOVASCULAR CATHETER [J].