Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application

被引：70

作者：

Masuda, M

Sugioka, K

Cheng, Y

Hongo, T

Shihoyama, K

Takai, H

Miyamoto, I

Midorikawa, K

机构：

[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan

[2] Sci Univ Tokyo, Fac Ind Sci & Technol, Dept Appl Elect, Chiba 2788510, Japan

[3] Tokyo Denki Univ, Dept Elect Engn, Chiyoda Ku, Tokyo 1018457, Japan

[4] HOYA Photon Corp, Toda, Saitama 3350027, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2004年 / 78卷 / 07期

关键词：

Microstructure; Acid Solution; Flow Direction; Femtosecond Laser; Hollow Structure;

D O I：

10.1007/s00339-003-2447-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor.

引用

收藏

页码：1029 / 1032

页数：4

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