Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers

被引：6

作者：

Kim, J ^{[1
]}

Berberoglu, H ^{[1
]}

Xu, XF ^{[1
]}

机构：

[1] Purdue Univ, Dept Mech Engn, W Lafayette, IN 47907 USA

来源：

PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS II | 2003年 / 4977卷

关键词：

photoetchable glass-ceramics; excimer laser; femtosecond laser; FOTURAN;

D O I：

10.1117/12.479239

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We discuss laser fabrication of microstructures in photoetchabte glass-ceramics, FOTURAN. A KrF excimer laser (lambda = 248 nm, tau = 25 ns) is used for surface micromachining. and a femtosecond laser (lambda = 800 nm, tau = 80 fs) is used for fabricatin- three-dimensional structures. Other aspects of the machining, such as the fluence and crystallization depth resulting from these two methods are presented. A detailed analysis of the absorption process of both lasers in FOTURAN is discussed.

引用

页码：324 / 334

页数：11

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