A large stepwise motion electrostatic actuator for a wireless microrobot

被引：20

作者：

Basset, P ^{[1
]}

Kaiser, A ^{[1
]}

Bigotte, P ^{[1
]}

Collard, D ^{[1
]}

Buchaillot, L ^{[1
]}

机构：

[1] ISEN, IEMN Dpt, CNRS, UMR 8520, Villeneuve Dascq, France

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984344

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An original large stepwise motion electrostatic microactuator for a wireless microrobot using a distributed Ciliary Motion System (CMS) [1] is presented. Coventorware(TM) cosolver simulations have shown x-displacement of 240 nm for one actuation step. Design of the antennas for inductive powering has been optimized in order to maximize the energy transfer. 24 mum gold electroplated hollow micro-coils have been fabricated on an epoxy substrate as receiver antennas. Q-factor of 29 at 13.56 MHz and induced voltage up to 100 V on a 1 kOmega load has been obtained. Remote actuation of an array of actuators supporting a 0.25 mm(2)/380 mum-thick piece of silicon has been successfully demonstrated with a pull-in voltage of 80 V.

引用

页码：606 / 609

页数：4

共 8 条

[1]

AKATA M, 1993, JMEMS, V2, P146

[2] Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS [J].

Akiyama, T ;

Collard, D ;

Fujita, H .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1997, 6 (01) :10-17

[3]

EBEFORS T, P TRANSDUCERS 99, P1802

[4]

FINKENZELLER K, 1999, RFID HDB, P68

[5]

LEE TH, 1998, DESIGN CMOS RADIO FR, P49

[6]

TAKEDA M, P MEMS 01, P182

[7]

VONARX JA, P TRANSDUCER 97, P999

[8] On-chip spiral inductors with patterned ground shields for Si-based RF IC's [J].

Yue, CP ;

Wong, SS .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1998, 33 (05) :743-752

← 1 →