A rad-hard CMOS active pixel sensor for electron microscopy

被引：42

作者：

Battaglia, Marco ^{[1
,2
]}

Contarato, Devis ^{[1
]}

Denes, Peter ^{[1
]}

Doering, Dionisio ^{[1
]}

Giubilato, Piero ^{[1
,3
,4
]}

Kim, Tae Sung ^{[1
]}

Mattiazzo, Serena ^{[3
,4
]}

Radmilovic, Velimir ^{[1
]}

Zalusky, Sarah ^{[1
,2
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA

[3] Ist Nazl Fis Nucl, Sez Padova, I-35131 Padua, Italy

[4] Univ Padua, Dipartimento Fis, I-35131 Padua, Italy

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2009年 / 598卷 / 02期

关键词：

Monolithic active pixel sensor; Transmission electron microscopy; SIMULATION; DETECTOR; TRACKING;

D O I：

10.1016/j.nima.2008.09.029

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Monolithic CMOS pixel sensors offer unprecedented opportunities for fast nano-imaging through direct electron detection in transmission electron microscopy. We present the design and a full characterisation of a CMOS pixel test structure able to withstand doses in excess of 1 Mrad. Data collected with electron beams at various energies of interest in electron microscopy are compared to predictions of simulation and to 1.5 GeV electron data to disentagle the effect of multiple scattering. The point spread function measured with 300 keV electrons is (8.1 +/- 1.6) pm for 10 mu m pixel and (10.9 +/- 2.3) mu m for 20 mu m pixels, respectively, which agrees well with the values of 8.4 and 10.5 mu m predicted by our simulation. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：642 / 649

页数：8

共 25 条

[1] GEANT4-a simulation toolkit [J].

Agostinelli, S ;

Allison, J ;

Amako, K ;

Apostolakis, J ;

Araujo, H ;

Arce, P ;

Asai, M ;

Axen, D ;

Banerjee, S ;

Barrand, G ;

Behner, F ;

Bellagamba, L ;

Boudreau, J ;

Broglia, L ;

Brunengo, A ;

Burkhardt, H ;

Chauvie, S ;

Chuma, J ;

Chytracek, R ;

Cooperman, G ;

Cosmo, G ;

Degtyarenko, P ;

Dell'Acqua, A ;

Depaola, G ;

Dietrich, D ;

Enami, R ;

Feliciello, A ;

Ferguson, C ;

Fesefeldt, H ;

Folger, G ;

Foppiano, F ;

Forti, A ;

Garelli, S ;

Giani, S ;

Giannitrapani, R ;

Gibin, D ;

Cadenas, JJG ;

González, I ;

Abril, GG ;

Greeniaus, G ;

Greiner, W ;

Grichine, V ;

Grossheim, A ;

Guatelli, S ;

Gumplinger, P ;

Hamatsu, R ;

Hashimoto, K ;

Hasui, H ;

Heikkinen, A ;

Howard, A .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2003, 506 (03) :250-303

[2]

BATTAGLIA M, 2006, P INT S DET DEV PART, P108

[3]

BATTAGLIA M, 2008, IEEE T NUCL SC UNPUB

[4] A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope [J].

Battaglia, Marco ;

Contarato, Devis ;

Glubilato, Piero ;

Greiner, Leo ;

Glesener, Lindsay ;

Hooberman, Benjamin .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2007, 579 (02) :675-679

[5] Response simulation of CMOS pixel sensors for the ILC vertex tracker [J].

Battaglia, Marco .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2007, 572 (01) :274-276

[6] Development of CMOS Monolithic Pixel Sensors With In-Pixel Correlated Double Sampling and Fast Readout [J].

Battaglia, Marco ;

Bussat, Jean-Marie ;

Contarato, Devis ;

Denes, Peter ;

Giubilato, Piero ;

Glesener, Lindsay E. .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2008, 55 (06) :3746-3750

[7] INELASTIC ELECTRONIC COLLISION CROSS-SECTIONS FOR MONTE-CARLO CALCULATIONS [J].

BICHSEL, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 52 (02) :136-139

[8] BEAM TEST-RESULTS FROM A PROTOTYPE FOR THE DELPHI MICROVERTEX DETECTOR [J].

CHABAUD, V ;

DIJKSTRA, H ;

GRONE, M ;

FLOHR, M ;

HORISBERGER, R ;

HUBBELING, L ;

MAEHLUM, G ;

PEISERT, A ;

SANDVIK, A ;

WEILHAMMER, P ;

CZERMAK, A ;

JALOCHA, P ;

KAPUSTA, P ;

TURALA, M ;

ZALEWSKA, A ;

SUNDELL, E ;

TUUVA, T ;

BATTAGLIA, M ;

CACCIA, M ;

KUCEWICZ, W ;

MERONI, C ;

REDAELLI, N ;

TURCHETTA, R ;

STOCCHI, A ;

TRONCON, C ;

VEGNI, G ;

BARICHELLO, G ;

MAZZUCATO, M ;

PEGORARO, M ;

SIMONETTO, F ;

ALLPORT, P ;

TYNDEL, M ;

SEEBRUNNER, HJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 292 (01) :75-80

[9]

CHAUVIE S, 2001, PREPARED CHEP 01 COM

[10] Active Pixel Sensors for electron microscopy [J].

Denes, P. ;

Bussat, J.-M. ;

Lee, Z. ;

Radmillovic, V. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2007, 579 (02) :891-894

← 1 2 3 →