Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica

被引：53

作者：

He, Shengguan ^{[1
,2
]}

Chen, Feng ^{[1
,2
]}

Liu, Keyin ^{[1
,2
]}

Yang, Qing ^{[1
,2
]}

Liu, Hewei ^{[1
,2
]}

Bian, Hao ^{[1
,2
]}

Meng, Xiangwei ^{[1
,2
]}

Shan, Chao ^{[1
,2
]}

Si, Jinhai ^{[1
,2
]}

Zhao, Yulong ^{[1
,2
]}

Hou, Xun ^{[1
,2
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Sch Elect & Informat Engn, Xian 710049, Peoples R China

[2] Xi An Jiao Tong Univ, Key Lab Photon Technol Informat Shaanxi Prov, Sch Elect & Informat Engn, Xian 710049, Peoples R China

来源：

OPTICS LETTERS | 2012年 / 37卷 / 18期

基金：

美国国家科学基金会;

关键词：

FEMTOSECOND LASER-PULSES; GLASS; CHANNELS; SHAPE;

D O I：

10.1364/OL.37.003825

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate an improved femtosecond laser irradiation followed by chemical etching process to create complex three-dimensional (3D) microchannels with arbitrary length and uniform diameter inside fused silica. A segmented chemical etching method of introducing extra access ports and a secondary power compensation is presented, which enables the fabrication of uniform 3D helical microchannels with length of 1.140 cm and aspect-ratio of 522. Based on this method, a micromixer which consists of a long helical microchannel and a y-tape microchannel was created inside the fused silica. We measured the mixing properties of the micromixer by injecting the phenolphthalein and NaOH solution through the two inlets of the y-tape microchannel. A rapid and efficient mixing was achieved in the 3D micromixer at a low Reynolds number. (C) 2012 Optical Society of America

引用

页码：3825 / 3827

页数：3

共 19 条

[1] Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching [J].