Adsorption process of metastable molecular oxygen on a Si(111)-(7 x 7) surface

被引:31
作者
Sakamoto, K [1 ]
Doi, S
Ushimi, Y
Ohno, K
Yeom, HW
Ohta, T
Suto, S
Uchida, W
机构
[1] Tohoku Univ, Dept Phys, Grad Sch Sci, Sendai, Miyagi 9808578, Japan
[2] Univ Tokyo, Res Ctr Spectrochem, Tokyo 1130033, Japan
来源
PHYSICAL REVIEW B | 1999年 / 60卷 / 12期
关键词
D O I
10.1103/PhysRevB.60.R8465
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The adsorption process of metastable molecular oxygen on a Si(111)-(7 x 7) surface is studied by ultraviolet photoelectron spectroscopy. At 120 K, three metastable states at 2.1, 3.8, and 5.1 eV grow up simultaneously following the decrease of the back-bond state as the dosage increases. After annealing at 600 K, we observed an unusual state attributed to the dangling bond. These results and the symmetries of the molecular orbitals lead to a conclusion that the metastable molecular species is adsorbed on top of an adatom stabilized by a coadsorbed atomic oxygen into the back bond.
引用
收藏
页码:R8465 / R8468
页数:4
相关论文
共 21 条
[1]   ATOM-RESOLVED SURFACE-CHEMISTRY - THE EARLY STEPS OF SI(111)-7X7 OXIDATION [J].
AVOURIS, P ;
LYO, IW ;
BOZSO, F .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :424-430
[2]  
BRATU P, 1993, PHYS REV B, V49, P14070
[3]   INTERPRETATION OF THE SPECTRA OBTAINED FROM OXYGEN-ADSORBED AND OXIDIZED SILICON SURFACES [J].
CIRACI, S ;
ELLIALTIOGLU, S ;
ERKOC, S .
PHYSICAL REVIEW B, 1982, 26 (10) :5716-5729
[4]   OBSERVATION OF 2 LONG-LIVED MOLECULAR-STATES OF O-2 ON SI(111)7X7 AT ROOM-TEMPERATURE [J].
COMTET, G ;
DUJARDIN, G ;
HELLNER, L ;
HIRAYAMA, T ;
ROSE, M ;
PHILIPPE, L ;
BESNARDRAMAGE, MJ .
SURFACE SCIENCE, 1995, 331 :370-374
[5]   Adsorption of O-2 on Si(111)7x7 compared at 300 and 30K [J].
Comtet, G ;
Hellner, L ;
Dujardin, G ;
Ramage, MJ .
SURFACE SCIENCE, 1996, 352 :315-321
[6]   SITE-SPECIFIC AND STATE-SELECTIVE PHOTOFRAGMENTATION OF MOLECULAR-OXYGEN ON SI(111)-(7X7) [J].
DUJARDIN, G ;
COMTET, G ;
HELLNER, L ;
HIRAYAMA, T ;
ROSE, M ;
PHILIPPE, L ;
BESNARDRAMAGE, MJ .
PHYSICAL REVIEW LETTERS, 1994, 73 (12) :1727-1730
[7]   OXIDATION OF THE SI(111) (7X7) SURFACE - ELECTRON-ENERGY LOSS SPECTROSCOPY, LOW-ENERGY ELECTRON-DIFFRACTION, AND AUGER-ELECTRON SPECTROSCOPY STUDIES [J].
EDAMOTO, K ;
KUBOTA, Y ;
KOBAYASHI, H ;
ONCHI, M ;
NISHIJIMA, M .
JOURNAL OF CHEMICAL PHYSICS, 1985, 83 (01) :428-436
[8]   INITIAL-STAGES OF OXYGEN-ADSORPTION ON SI(111) .2. THE MOLECULAR PRECURSOR [J].
HOFER, U ;
MORGEN, P ;
WURTH, W ;
UMBACH, E .
PHYSICAL REVIEW B, 1989, 40 (02) :1130-1145
[9]   METASTABLE MOLECULAR PRECURSOR FOR THE DISSOCIATIVE ADSORPTION OF OXYGEN ON SI(111) [J].
HOFER, U ;
MORGEN, P ;
WURTH, W ;
UMBACH, E .
PHYSICAL REVIEW LETTERS, 1985, 55 (27) :2979-2982
[10]   VIBRATIONAL STUDY OF THE INITIAL-STAGES OF THE OXIDATION OF SI(111) AND SI(100) SURFACES [J].
IBACH, H ;
BRUCHMANN, HD ;
WAGNER, H .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 29 (03) :113-124