Pulsed-laser deposition of Y-Ba-Cu-O films: The influence of fluence and oxygen pressure

被引：6

作者：

Bierleutgeb, K

Proyer, S

机构：

[1] Angewandte Physik, Johannes-Kepler-Univ. Linz, A-4040 Linz

来源：

APPLIED SURFACE SCIENCE | 1997年 / 109卷

关键词：

pulsed-laser deposition; thin films; Y1Ba2Cu3O7-x;

D O I：

10.1016/S0169-4332(96)00669-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The electrical and morphological properties of YBa2Cu3O7-x (YBCO) films, including the number density of particulates, strongly depend on the oxygen background pressure employed during deposition. The degradation of electrical and morphological film properties observed at low oxygen pressures can be compensated by a decrease in laser fluence, while the number density of particulates increases with decreasing fluence.

引用

收藏

页码：331 / 334

页数：4

相关论文

共 13 条

[1]

ANIMISOV SI, 1993, PHYS REV B, V48, P12076

[2] LASER-INDUCED FORMATION AND SURFACE PROCESSING OF HIGH-TEMPERATURE SUPERCONDUCTORS [J].

BAUERLE, D .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1989, 48 (06) :527-542

[3]

Bauerle D., 2011, LASER PROCESSING CHE, V4

[4] THE ROLE OF GAS-PHASE OXIDATION AND COMBINATION DURING LASER DEPOSITION OF YBA2CU3O7-X IN AMBIENT OXYGEN [J].

ELASTAL, AH ;

MORROW, T ;

GRAHAM, WG ;

WALMSLEY, DG .

SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 1995, 8 (07) :529-533

[5] CORRELATION BETWEEN TARGET-SUBSTRATE DISTANCE AND OXYGEN-PRESSURE IN PULSED LASER DEPOSITION OF YBA2CU3O7 [J].

KIM, HS ;

KWOK, HS .

APPLIED PHYSICS LETTERS, 1992, 61 (18) :2234-2236

[6] INVESTIGATION OF THE ABLATED FLUX CHARACTERISTICS DURING PULSED-LASER ABLATION DEPOSITION OF MULTICOMPONENT OXIDES [J].

LICHTENWALNER, DJ ;

AUCIELLO, O ;

DAT, R ;

KINGON, AI .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (12) :7497-7505

[7] STUDIES OF STRUCTURAL DISORDER IN REBA2CU3O7-X THIN-FILMS (RE = RARE-EARTH) AS A FUNCTION OF RARE-EARTH IONIC RADIUS AND FILM DEPOSITION CONDITIONS [J].

MACMANUSDRISCOLL, JL ;

ALONSO, JA ;

WANG, PC ;

GEBALLE, TH ;

BRAVMAN, JC .

PHYSICA C, 1994, 232 (3-4) :288-308

[8] KINETIC-THEORY OF GAS-SURFACE INTERACTION [J].

MULLER, H ;

BRENIG, W .

ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1979, 34 (02) :165-173

[9] Particulates on pulsed-laser deposited Y-Ba-Cu-O films [J].

Proyer, S ;

Stangl, E ;

Borz, M ;

Hellebrand, B ;

Bauerle, D .

PHYSICA C, 1996, 257 (1-2) :1-15

[10] TIME-INTEGRATED PHOTOGRAPHY OF LASER-INDUCED PLASMA PLUMES [J].

PROYER, S ;

STANGL, E .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1995, 60 (06) :573-580