Particulates on pulsed-laser deposited Y-Ba-Cu-O films

被引:67
作者
Proyer, S
Stangl, E
Borz, M
Hellebrand, B
Bauerle, D
机构
[1] Angewandte Physik, Johannes-Kepler-Univ. Linz, A-4040 Linz
来源
PHYSICA C | 1996年 / 257卷 / 1-2期
关键词
YBA2CU3O7-X THIN-FILMS; SUPERCONDUCTING FILMS; INSITU GROWTH; ABLATION; Y1BA2CU3O7-DELTA; OPTIMIZATION; EVAPORATION; ORIGIN; OXYGEN; MULTILAYERS;
D O I
10.1016/0921-4534(95)00678-8
中图分类号
O59 [应用物理学];
学科分类号
摘要
Different types of particulates observed on high temperature superconducting Y-Ba-Cu-O films prepared by pulsed-laser deposition on MgO substrates are investigated as a function of deposition parameters and classified according to their size, shape, and chemical composition. Among the parameters studied in detail are the oxygen pressure, the substrate temperature, the laser energy, fluence, spot size, and the number of pulses. The interrelations between the different particulates, the ablation and deposition rates, the shape of the visible plasma plume, and the film properties have been investigated.
引用
收藏
页码:1 / 15
页数:15
相关论文
共 56 条
[1]   A TEM STUDY OF MICROSTRUCTURES OF YBA2CU3O7-X THIN-FILMS DEPOSITED ON LAA1O3 BY LASER ABLATION [J].
BASU, SN ;
CARIM, AH ;
MITCHELL, TE .
JOURNAL OF MATERIALS RESEARCH, 1991, 6 (09) :1823-1828
[2]   LASER-INDUCED FORMATION AND SURFACE PROCESSING OF HIGH-TEMPERATURE SUPERCONDUCTORS [J].
BAUERLE, D .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1989, 48 (06) :527-542
[3]   HIGH-TC THIN-FILMS PREPARED BY LASER ABLATION - MATERIAL DISTRIBUTION AND DROPLET PROBLEM [J].
BLANK, DHA ;
IJSSELSTEIJN, RPJ ;
OUT, PG ;
KUIPER, HJH ;
FLOKSTRA, J ;
ROGALLA, H .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 13 (01) :67-74
[4]   A MORPHOLOGICAL GROWTH-MODEL FOR LASER-ABLATED Y1BA2CU3O7-X THIN-FILMS [J].
BORCK, J ;
LINZEN, S ;
ZACH, K ;
SEIDEL, P .
PHYSICA C, 1993, 213 (1-2) :145-150
[5]   STABILITY LIMITS OF THE PEROVSKITE STRUCTURE IN THE Y-BA-CU-O SYSTEM [J].
BORMANN, R ;
NOLTING, J .
APPLIED PHYSICS LETTERS, 1989, 54 (21) :2148-2150
[6]  
BRAILOVSKY AB, 1995, APPL PHYS A-MATER, V61, P81, DOI 10.1007/BF01538216
[7]   OCCURRENCE AND ORIGIN OF COPPER-OXIDE PARTICULATES PRIOR TO THE DEPOSITION OF YBACUO THIN-FILMS [J].
BUSCH, H ;
FINK, A ;
MULLER, A ;
SAMWER, K .
SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 1992, 5 (11) :624-626
[8]   ORIGIN OF SURFACE-ROUGHNESS FOR C-AXIS ORIENTED Y-BA-CU-O SUPERCONDUCTING FILMS [J].
CHANG, CC ;
WU, XD ;
RAMESH, R ;
XI, XX ;
RAVI, TS ;
VENKATESAN, T ;
HWANG, DM ;
MUENCHAUSEN, RE ;
FOLTYN, S ;
NOGAR, NS .
APPLIED PHYSICS LETTERS, 1990, 57 (17) :1814-1816
[9]   LASER-ABLATION THRESHOLD OF YBA2CU3O6+X [J].
DAM, B ;
RECTOR, J ;
CHANG, MF ;
KARS, S ;
DEGROOT, DG ;
GRIESSEN, R .
APPLIED PHYSICS LETTERS, 1994, 65 (12) :1581-1583
[10]   STEADY-STATE PULSED-LASER DEPOSITION TARGET SCANNING FOR IMPROVED PLUME STABILITY AND REDUCED PARTICLE DENSITY [J].
DOUGHTY, C ;
FINDIKOGLU, AT ;
VENKATESAN, T .
APPLIED PHYSICS LETTERS, 1995, 66 (10) :1276-1278